JPH0519391B2 - - Google Patents

Info

Publication number
JPH0519391B2
JPH0519391B2 JP62304239A JP30423987A JPH0519391B2 JP H0519391 B2 JPH0519391 B2 JP H0519391B2 JP 62304239 A JP62304239 A JP 62304239A JP 30423987 A JP30423987 A JP 30423987A JP H0519391 B2 JPH0519391 B2 JP H0519391B2
Authority
JP
Japan
Prior art keywords
liquid
bellows
piezoelectric element
diaphragm
laminated piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62304239A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01144690A (ja
Inventor
Akira Wachi
Minehisa Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ohkura Electric Co Ltd
Original Assignee
Ohkura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ohkura Electric Co Ltd filed Critical Ohkura Electric Co Ltd
Priority to JP62304239A priority Critical patent/JPH01144690A/ja
Publication of JPH01144690A publication Critical patent/JPH01144690A/ja
Publication of JPH0519391B2 publication Critical patent/JPH0519391B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Impact Printers (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP62304239A 1987-11-30 1987-11-30 積層圧電アクチュエータ Granted JPH01144690A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62304239A JPH01144690A (ja) 1987-11-30 1987-11-30 積層圧電アクチュエータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62304239A JPH01144690A (ja) 1987-11-30 1987-11-30 積層圧電アクチュエータ

Publications (2)

Publication Number Publication Date
JPH01144690A JPH01144690A (ja) 1989-06-06
JPH0519391B2 true JPH0519391B2 (en]) 1993-03-16

Family

ID=17930671

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62304239A Granted JPH01144690A (ja) 1987-11-30 1987-11-30 積層圧電アクチュエータ

Country Status (1)

Country Link
JP (1) JPH01144690A (en])

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0410591U (en]) * 1990-05-09 1992-01-29
JPH0468571U (en]) * 1990-10-25 1992-06-17
JP2658812B2 (ja) * 1993-08-12 1997-09-30 日本電気株式会社 圧電アクチュエータ
JPH10275018A (ja) * 1997-03-31 1998-10-13 Hitachi Metals Ltd マスフローコントローラ
DE10159749A1 (de) * 2001-12-05 2003-06-12 Bosch Gmbh Robert Brennstoffeinspritzventil
JP2008032445A (ja) * 2006-07-27 2008-02-14 Sii Nanotechnology Inc 圧電アクチュエータおよびそれを用いた走査型プローブ顕微鏡
JPWO2011001603A1 (ja) 2009-06-29 2012-12-10 パナソニック株式会社 アルカリ乾電池
JP6047316B2 (ja) * 2012-06-29 2016-12-21 日本特殊陶業株式会社 圧電アクチュエータ
JP2014193035A (ja) * 2013-03-27 2014-10-06 Taiheiyo Cement Corp 圧電アクチュエータ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU506789B2 (en) * 1974-10-03 1980-01-24 Physics International Company Improvement in piezoelectric stack insulation
JPS61149991U (en]) * 1985-03-08 1986-09-16

Also Published As

Publication number Publication date
JPH01144690A (ja) 1989-06-06

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